Wafer Level Thin Film Encapsulation for BAW RF MEMS
作者： J.L. Pornin , C. Gillot , G. Parat , F. Jacquet , E. Lagoutte
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摘要: … To summarise the results from this work, BAW filters have been … The resonance frequency of the BAW filter was not affected … Introduction Since MEMS contain fragile movable parts and …
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