Microelectromechanical signal processor fabrication

摘要: A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input output transducers are interdigitated comb electrodes. mechanical coupling between the includes flexures, displacement of electrodes producing bending elements flexures. By sealing filters in a vacuum providing on-board circuitry, high signal-to-noise ratios quality factors achievable. Construction real-time spectrum analyzer many resonators, provides device with accuracy short sample time.