Non-destructive X-ray study of the interphases in Mo/Si and Mo/B4C/Si/B4C multilayers
作者： H. Maury , P. Jonnard , J.-M. André , J. Gautier , M. Roulliay
DOI: 10.1016/J.TSF.2006.02.073
关键词: Secondary ion mass spectrometry 、 Thin film 、 Nanometre 、 Sputter deposition 、 Silicon 、 X-ray reflectivity 、 Analytical chemistry 、 Chemistry 、 Silicide 、 Cavity magnetron
摘要: … analysis of the composition of the multilayer period, based on the … present in the Mo/Si multilayer and thus, the composition and … a set of Mo/Si multilayers of small period. Moreover, …
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