Group III Nitride Semiconductor Optical Device Group III Nitride Semiconductor Optical Device

作者: Chiaki Sasaoka , Kazuhisa Fukuda , Akitaka Kimura

DOI:

关键词: Cladding (fiber optics)LaserNitride semiconductorsSemiconductorOptoelectronicsSuperlatticeMaterials science

摘要: The present invention provides a semiconductor laser excellent in the current injection efficiency. In an inner stripe type according to invention, p cladding layer 309 has superlattice structure composed of GaN layers and Al 0.1 Ga 0.9 N layers, which are alternately layered on each other. portion high dislocation density low density. That is, is relatively region directly above opening current-confining 308, whereas 308.

参考文章(16)
Masaaki Onomura, Peter J. Parbrook, Masayuki Ishikawa, Shinji Saito, Yukie Nishikawa, Genichi Hatakoshi, Compound semiconductor devices and methods of making compound semiconductor devices ,(1995)
Yasutoshi Kawaguchi, Akihiko Ishibashi, Ayumu Tsujimura, Nobuyuki Otsuka, Nitride semiconductor, method for manufacturing the same and nitride semiconductor device ,(2003)
Michael S. Shur, Remigijus Gaska, Light emitting heterostructure ,(2003)
Yukio Shakuda, Haruo Tanaka, Gallium nitride type laser for emitting blue light ,(1999)
Masaaki Onomura, Peter James Parbrook, Masayuki Ishikawa, Shinji Saito, Yukie Nishikawa, Semicoductor device having a hetero interface with a lowered barrier ,(1996)
Takahisa Kurahashi, Shouichi Ohyama, Hiroshi Nakatsu, Tetsuroh Murakami, Light emitting element with multiple multi-layer reflectors and a barrier layers ,(2004)
Hideki Gotoh, Satoru Nagao, Hideyoshi Horie, Toshinari Fujimori, Semiconductor device having a ridge or groove ,(1997)
O Patent Division Nitta, O Patent Division Ishikawa, Yasuhiko C, O Patent Division Nishikawa, Masayuki C, O Patent Division Kokubun, O Patent Division Tsuburai, Yukie C, Koichi C, Yoshihiro C, Semiconductor laser device and the manufacturing method thereof ,(1989)
Atsuya Ito, Yoshinori Kimura, Mamoru Miyachi, Toshiyuki Tanaka, Atsushi Watanabe, Hirokazu Takahashi, Hiroyuki Ota, Group III nitride compound semiconductor laser and manufacturing method thereof ,(2002)