Radio frequency magnetron sputtering deposition of hetero-epitaxial strontium barium niobate thin films (SrxBa1−xNb2O6)
作者： M. Cuniot-Ponsard , J. M. Desvignes , B. Ea-Kim , E. Leroy
DOI: 10.1063/1.1535749
关键词: Mineralogy 、 Epitaxy 、 Deposition (law) 、 Optoelectronics 、 Strontium barium niobate 、 Thin film 、 Materials science 、 Sputter deposition 、 Sputtering 、 Ferroelectric ceramics 、 Stoichiometry 、 General Physics and Astronomy
摘要: Excellent electro-optic properties of SrxBa1−xNb2O6 crystals (SBN:x) motivate the attempts to control deposition high ordered SBN thin films with aim optical waveguiding and processing integration. We have examined ability sputtering techniques deposit stoichiometric films. Composition analysis has enabled us probe mechanisms which target-film composition transfer define an experimental strategy for stoichiometry control. Epitaxial (001) been obtained on MgO (100) substrates, exhibit two in-plane orientations (±31°) mirror symmetric cell axis.
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