作者: Paul F. Ndione , Mounir Gaidi , Cristophe Durand , Roberto Morandotti , Mohamed Chaker
DOI: 10.1117/12.628556
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摘要: In this study, we report for the first time epitaxial growth of CBN thin films on Magnesium Oxide (MgO) substrates optical device applications. A high deposition temperature (greater than or equal to 800 o C) is required obtain films. parametric study proposed in order elaborate with a crystal structure as close possible that bulk single and good characteristics. particular, low oxygen pressure (1 mTorr) allows synthesizing high-quality an out-off plane lattice parameter comparable one material at surface roughness. The characterization reveals transmission 85 %) refractive index 2.22 1.55 μm certain conditions. These properties clearly indicate potential waveguide This work presents significant step toward integration use