Process for producing a hybrid integrated optical circuit and device for emitting light waves
作者： Wolf-Henning Rech , Hans Kragl
DOI:
关键词: Materials science 、 Semiconductor 、 Process (computing) 、 Optoelectronics 、 Photonic integrated circuit 、 Waveguide channel
摘要: The proposal is for a process producing hybrid integrated optical circuit. According to the one uses shaping tool (3) with receptacle-forming devices (4) an electro-optical semiconductor component (2) and negative moulds (5) waveguide channel (9) (12) light-guide (10). of adjust in relation mould during polymer. basic unit (13) produced consists which adjusted formed connected (6) shaped polymer by means (10) can be self-adjustingly coupled channel. are firmly secured together covering (7), being filled optically transparent material, thus providing wave-guide (20).
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