作者: Davide Gandolfi , Fernando Ramiro-Manzano , Francisco Aparicio Rebollo , Mher Ghulinyan , Georg Pucker
DOI: 10.3390/S150304796
关键词: Materials science 、 Optics 、 Resonator 、 Figure of merit 、 Silicon nitride 、 Whispering-gallery wave 、 Optoelectronics 、 Silicon 、 Edge (geometry) 、 Waveguide (optics) 、 Refractive index
摘要: In this paper, we report on the measurement and modeling of enhanced optical refractometric sensors based whispering gallery modes. The devices under test are microresonators made silicon nitride oxide, which differ in their sidewall inclination angle. our approach, these vertically coupled to a buried waveguide with aim creating integrated cost-effective devices. Device shows that optimization device is delicate balance resonance quality factor evanescent field overlap surrounding environment analyze. By numerical simulations, show microdisk thickness critical yield high figure merit for sensor edge should be kept as possible. We also bulk-sensing figures 1600 RIU−1 (refractive index unit) feasible.