Method for manufacturing a micromechanical system
作者： Thoralf Kautzsch , Boris Binder , Maik Stegemann , Mirko Vogt , Heiko Froehlich
DOI:
关键词: Materials science 、 Process (computing) 、 Structuring 、 Engineering physics 、 Structural engineering 、 Layer (electronics) 、 Transistor
摘要: A method for manufacturing a micromechanical system includes forming in Front-End-of-Line (FEOL) process transistors transistor region; after the FEOL-process, sacrificial layer; structuring layer to form structured functional at least partially covering and removing create cavity.
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