Solution deposition of thin solid compound films by a successive ionic-layer adsorption and reaction process

作者: Y.F. Nicolau

DOI: 10.1016/0378-5963(85)90241-7

关键词: AdsorptionIonic bondingCrystalliteSalt (chemistry)Materials scienceDeposition (phase transition)Layer (electronics)Substrate (chemistry)Inorganic chemistryChemical reaction

摘要: … layer are formed. The SO 2 diffuse back from the outer Helmholtz layer through the diffusion layer … The whole spindle with arms and substrates, beakers and rinsing vessels are all tightly …

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