Highly temperature-stable Si3N4 perforated grids

作者: H.W. Zandbergen , A. Pruymboom , G. Van Tendeloo

DOI: 10.1016/0304-3991(88)90326-9

关键词: MembraneAnalytical chemistryChemistryInorganic compoundSuperconductivityHigh-temperature superconductivitySample preparationMineralogyElectron microscopeSputteringGrid

摘要: Abstract Perforated Si3N4 membranes on Pt grids were prepared by sputtering carbon-coated holey Triofar films. The latter removed heating slowly to 500°C. combination of found be stable up 1000°C at which temperature still a good attachment the grid was retained. As an example, in-situ YBa2Cu3O7 (a new high Tc superconductor) in electron microscope and furnace 450°C are compared.

参考文章(6)
W. J. HARRIS, Holey Films for Electron Microscopy Nature. ,vol. 196, pp. 499- 500 ,(1962) , 10.1038/196499B0
L.D. Schmidt, T. Wang, A. Vacquez, Electron microscopy of catalyst particles Ultramicroscopy. ,vol. 8, pp. 175- 184 ,(1982) , 10.1016/0304-3991(82)90286-8
W. W. Molzen, A. N. Broers, J. J. Cuomo, J. M. E. Harper, R. B. Laibowitz, Materials and techniques used in nanostructure fabrication Journal of Vacuum Science and Technology. ,vol. 16, pp. 269- 272 ,(1979) , 10.1116/1.569924