CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing
作者： Eva Ryckeboer , Xiaomin Nie , Ananth Z. Subramanian , Daan Martens , Peter Bienstman
DOI: 10.1117/12.2234978
关键词: Spectrometer 、 Hybrid silicon laser 、 Optics 、 Arrayed waveguide grating 、 Grating 、 Photonics 、 Echelle grating 、 Photonic integrated circuit 、 Materials science 、 Silicon photonics
摘要: We report on miniaturized optical spectrometers integrated a photonic circuit (PIC) platform based silicon nitride waveguides and fabricated in CMOS-compatible approach. As compared to silicon- on-insulator PIC-platform, the usage of allows for operation visible near infrared. Furthermore, moderately high refractive index contrast silicon-nitride wire provides valuable compromise between compactness, loss sensitivity phase error. Three generic types on-chip are discussed: arrayed waveguide grating (AWG) spectrometer, echelle or planar concave (PCG) spectrometer stationary Fourier transform (FTS) spectrometer. Both design as well experimental results presented discussed. For FTS specific is described detail leading an ultra-small (0.1 mm2) footprint device with resolution 1 nm spectral range 100nm. Examples given these biosensing, absorption spectroscopy Raman spectroscopy.
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V.I. Tolstikhin, A. Densmore, Y. Logvin, K. Pimenov, F. Wu, S. Laframboise, 44-channel optical power monitor based on an echelle grating demultiplexer and a waveguide photodetector array monolithically integrated on an InP substrate optical fiber communication conference. ,(2003) , 10.1109/OFC.2003.316055
Daan Martens, Ananth Z. Subramanian, Shibnath Pathak, Michael Vanslembrouck, Peter Bienstman, Wim Bogaerts, Roel G. Baets, Compact Silicon Nitride Arrayed Waveguide Gratings for Very Near-Infrared Wavelengths IEEE Photonics Technology Letters. ,vol. 27, pp. 137- 140 ,(2015) , 10.1109/LPT.2014.2363298
Etienne le Coarer, Sylvain Blaize, Pierre Benech, Ilan Stefanon, Alain Morand, Gilles Lérondel, Grégory Leblond, Pierre Kern, Jean Marc Fedeli, Pascal Royer, Wavelength-scale stationary-wave integrated Fourier-transform spectrometry Nature Photonics. ,vol. 1, pp. 473- 478 ,(2007) , 10.1038/NPHOTON.2007.138
E. Ryckeboer, A. Gassenq, M. Muneeb, N. Hattasan, S. Pathak, L. Cerutti, J.B. Rodriguez, E. Tournié, W. Bogaerts, R. Baets, G. Roelkens, Silicon-on-insulator spectrometers with integrated GaInAsSb photodiodes for wide-band spectroscopy from 1510 to 2300 nm Optics Express. ,vol. 21, pp. 6101- 6108 ,(2013) , 10.1364/OE.21.006101
Wim Bogaerts, Shankar Kumar Selvaraja, Pieter Dumon, Joost Brouckaert, Katrien De Vos, Dries Van Thourhout, Roel Baets, Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology IEEE Journal of Selected Topics in Quantum Electronics. ,vol. 16, pp. 33- 44 ,(2010) , 10.1109/JSTQE.2009.2039680
Jürgen Kasberger, Thomas Fromherz, Ahmad Saeed, Bernhard Jakoby, Miniaturized integrated evanescent field IR-absorption sensor: Design and experimental verification with deteriorated lubrication oil Vibrational Spectroscopy. ,vol. 56, pp. 129- 135 ,(2011) , 10.1016/J.VIBSPEC.2011.01.003
Kerstin Wörhoff, René G. Heideman, Arne Leinse, Marcel Hoekman, TriPleX: a versatile dielectric photonic platform Advanced Optical Technologies. ,vol. 4, pp. 189- 207 ,(2015) , 10.1515/AOT-2015-0016
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. DuBois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. Van Dorpe, Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532–900 nm Wavelength Window Fabricated Within a CMOS Pilot Line IEEE Photonics Journal. ,vol. 5, pp. 2202809- 2202809 ,(2013) , 10.1109/JPHOT.2013.2292698
A. Gorin, A. Jaouad, E. Grondin, V. Aimez, P. Charette, Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties. Optics Express. ,vol. 16, pp. 13509- 13516 ,(2008) , 10.1364/OE.16.013509
Wei Shi, Xu Wang, Charlie Lin, Han Yun, Yang Liu, Tom Baehr-Jones, Michael Hochberg, Nicolas A. F. Jaeger, Lukas Chrostowski, Silicon photonic grating-assisted, contra-directional couplers Optics Express. ,vol. 21, pp. 3633- 3650 ,(2013) , 10.1364/OE.21.003633