Method and system for fast on-line electro-optical detection of wafer defects

摘要: A method and system for fast on-line electro-optical detection of wafer defects featuring illuminating with a short light pulse from repetitively pulsed laser, field view an camera having microscopy optics, imaging moving wafer, on to focal plane assembly optically forming surface photo-detectors at the optical system, formed six detector ensembles, each ensemble including array four two-dimensional CCD matrix photo-detectors, whereby photo-detector produces electronic image large two million pixels, such that simultaneously created images different detectors are processed in parallel using conventional processing techniques, comparing imaged another serving as reference, order find differences corresponding indicative presence die defect.