Solid state image pickup device and manufacturing method therefor

作者: Tetsunobu Kochi , Hiroki Hiyama , Toru Koizumi , Shigetoshi Sugawa , Katsuhito Sakurai

DOI:

关键词: Metal gateTransistorField-effect transistorSemiconductorPickupCharge carrierMaterials scienceOptoelectronicsConductivityElectrode

摘要: A MOS-type solid-state image pickup device, on a semiconductor substrate, includes photoelectric conversion unit having first region of conductivity type, second third the and transfer MOS transistor gate electrode disposed an insulation film transferring charge carrier from fourth region. In addition, amplifying is connected to region, fifth type continuously under electrode, apart transistor.

参考文章(35)
Atsushi Kamashita, Satoshi Suzuki, Solid picture element ,(1998)
Bryan David Ackland, David Andrew Inglis, Alexander George Dickinson, Combined photogate and photodiode active pixel image sensor ,(1995)
Ihachiro Gofuku, Hiraku Kozuka, Shigetoshi Sugawa, Photoelectric converting device and image processing apparatus utilizing the same ,(1992)
Clifford I. Drowley, Mark S. Swenson, Shrinath Ramaswami, Jennifer J. Patterson, Semiconductor image sensor ,(1997)
Robert M. Guidash, Paul P. Lee, Teh-Hsuang Lee, Eric Gordon Stevens, Active pixel sensor integrated with a pinned photodiode ,(1996)