Solid picture element

作者: Atsushi Kamashita , Satoshi Suzuki

DOI:

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摘要: A solid picture element that transfers charges completely from a photodiode portion to an amplifying transistor substantially eliminate residual images and methods of its manufacture are disclosed. The includes buried in communication with transfer gate is selective path for the transistor. charge accumulation region located so it not contact upper surface semiconductor substrate margin 0.0 0.2 μm closer than any depletion prevention region. Methods present invention include using as mask implanting ions into at first angle form second, steeper, Alternative sifting sift end margins achieve desired geometry.

参考文章(6)
Robert M. Guidash, Teh-Hsuang Lee, Active pixel sensor with switched supply row select ,(1997)
Atsushi Kamashita, Tadao Isogai, Satoshi Suzuki, Photoelectric conversion element and photoelectric conversion apparatus ,(1996)
Robert M. Guidash, Paul P. Lee, Teh-Hsuang Lee, Eric Gordon Stevens, Active pixel sensor integrated with a pinned photodiode ,(1996)
Robert M. Guidash, Paul P. Lee, Teh-Hsuang Lee, Partially pinned photodiode for solid state image sensors ,(1998)