作者: PG Kotula , LN Brewer , J Michael , L Giannuzzi
DOI: 10.1017/S1431927607071851
关键词: Tomographic reconstruction 、 Spectral imaging 、 Materials science 、 Computed tomography laser mammography 、 Chemical imaging 、 Multivariate statistical 、 Computed tomographic 、 Optics 、 Electron 、 Spectral line
摘要: Spectral imaging, where complete x-ray spectra are acquired from 2D or 3D arrays of points, is a powerful microanalytical technique, especially when combined with multivariate statistical analysis [1]. Chemical typically spectroscopic imaging mapping energy-loss electrons x rays has been performed on flat [2-3] pillar-shaped specimens [4] in the TEM to achieve chemical images. In this paper we describe results acquisition and analysis, via (MSA), spectral images needle-shaped FIB specimen, tilted -90 +90 newly available specimen holder Fischione Instruments [5], full EDS coverage constant thickness throughout tomographic series.