Quantitative EDXS: Influence of geometry on a four detector system.
作者： Johanna Kraxner , Margit Schäfer , Otto Röschel , Gerald Kothleitner , Georg Haberfehlner
DOI: 10.1016/J.ULTRAMIC.2016.10.005
关键词: Geometry 、 Energy (signal processing) 、 Detector 、 Systematic error 、 Optics 、 Beryllium 、 Solid angle 、 Chemistry 、 Absorption (electromagnetic radiation) 、 Atomic number 、 Sample (graphics)
摘要: The influence of the geometry on quantitative energy dispersive X-ray spectrometry (EDXS) analysis is determined for a ChemiSTEM system (Super-X) in combination with low-background double-tilt specimen holder. For first time experimental measurements simulations used to determine positions individual detectors Super-X system. These allow us calculate detector's solid angles and estimate amount detector shadowing its EDXS analysis, including absorption correction using ζ-factor method. Both by brass portions beryllium carrier holder severely affect quantification low medium atomic number elements. A multi-detector discussed terms practical consequences described effects, evaluation Fayalit sample demonstrated. Corrections suggestions minimizing systematic errors are improve methods
elsevier.com
sci-hub.se 参考文章(25)
John T. Conway, Analytical solution for the solid angle subtended at any point by an ellipse via a point source radiation vector potential Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment. ,vol. 614, pp. 17- 27 ,(2010) , 10.1016/J.NIMA.2009.11.075
K. Lepinay, F. Lorut, R. Pantel, T. Epicier, Chemical 3D tomography of 28nm high K metal gate transistor: STEM XEDS experimental method and results. Micron. ,vol. 47, pp. 43- 49 ,(2013) , 10.1016/J.MICRON.2013.01.004
Peter Lechner, Stefan Eckbauer, Robert Hartmann, Susanne Krisch, Dieter Hauff, Rainer Richter, Heike Soltau, Lothar Strüder, Carlo Fiorini, Emilio Gatti, Antonio Longoni, Marco Sampietro, Silicon drift detectors for high resolution room temperature X-ray spectroscopy Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment. ,vol. 377, pp. 346- 351 ,(1996) , 10.1016/0168-9002(96)00210-0
Stefanie Fladischer, Werner Grogger, Quantitative EDXS analysis of organic materials using the ζ-factor method. Ultramicroscopy. ,vol. 136, pp. 26- 30 ,(2014) , 10.1016/J.ULTRAMIC.2013.07.015
R. Pantel, Coherent Bremsstrahlung effect observed during STEM analysis of dopant distribution in silicon devices using large area silicon drift EDX detectors and high brightness electron source Ultramicroscopy. ,vol. 111, pp. 1607- 1618 ,(2011) , 10.1016/J.ULTRAMIC.2011.09.001
Günter Möbus, Ron C. Doole, Beverley J. Inkson, Spectroscopic electron tomography. Ultramicroscopy. ,vol. 96, pp. 433- 451 ,(2003) , 10.1016/S0304-3991(03)00106-2
J S Iwanczyk, S Barkan, V D Saveliev, C R Tull, L Feng, B E Patt, D E Newbury, J A Small, N J Zaluzec, Large Area Silicon Multi-Cathode Detector Developments for Microanalysis and High Speed Elemental Mapping Microscopy and Microanalysis. ,vol. 11, ,(2005) , 10.1017/S1431927605510183
PG Kotula, LN Brewer, J Michael, L Giannuzzi, Computed Tomographic Spectral Imaging: 3D STEM-EDS Spectral Imaging Microscopy and Microanalysis. ,vol. 13, pp. 1324- 1325 ,(2007) , 10.1017/S1431927607071851
C. T. Chantler, Theoretical Form Factor, Attenuation, and Scattering Tabulation for Z=1–92 from E=1–10 eV to E=0.4–1.0 MeV Journal of Physical and Chemical Reference Data. ,vol. 24, pp. 71- 643 ,(1995) , 10.1063/1.555974
HS von Harrach, P Dona, B Freitag, H Soltau, A Niculae, M Rohde, An integrated Silicon Drift Detector System for FEI Schottky Field Emission Transmission Electron Microscopes Microscopy and Microanalysis. ,vol. 15, pp. 208- 209 ,(2009) , 10.1017/S1431927609094288