Interface states study of intrinsic amorphous silicon for crystalline silicon surface passivation in HIT solar cell

作者: You-Peng Xiao , Xiu-Qin Wei , Lang Zhou

DOI: 10.1088/1674-1056/26/4/048104

关键词: Amorphous siliconHeterojunctionAmorphous solidCrystalline siliconOptoelectronicsSolar cellPassivationNanocrystalline siliconMaterials scienceCarrier lifetime

摘要: Intrinsic hydrogenated amorphous silicon (a-Si:H) film is deposited on n-type crystalline (c-Si) wafer by hot-wire chemical vapor deposition (HWCVD) to analyze the amorphous/crystalline heterointerface passivation properties. The minority carrier lifetime of symmetric heterostructure measured using Sinton Consulting WCT-120 tester system, and a simple method determining interface state density from measurement proposed. also performed deep-level transient spectroscopy (DLTS) prove validity method. microstructures hydrogen bonding configurations a-Si:H films with different dilutions are investigated spectroscopic ellipsometry (SE) Fourier transform infrared (FTIR) respectively. Lower values obtained more uniform, compact fewer bulk defects HWCVD.

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