A four-level VLSI bipolar metallization design with chemical-mechanical planarization
作者： W. L. Guthrie , W. J. Patrick , E. Levine , H. C. Jones , E. A. Mehter
DOI: 10.1147/RD.365.0845
关键词: Engineering physics 、 Chemical-mechanical planarization 、 Materials science 、 Very-large-scale integration 、 Electronic engineering
摘要:
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sci-hub.se 参考文章(29)
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