The effect of annealing treatment on microstructure and properties of indium tin oxides films
作者： Chih-Hao Yang , Shih-Chin Lee , Suz-Cheng Chen , Tien-Chai Lin
DOI: 10.1016/J.MSEB.2006.01.012
关键词: Amorphous solid 、 Materials science 、 Scanning electron microscope 、 Analytical chemistry 、 Sputtering 、 Microstructure 、 Sputter deposition 、 Thin film 、 Indium tin oxide 、 Indium
摘要: … the microstructure of ITO films on annealing treatment in an argon atmosphere. The microstructure of … to concentrate the annealing effect to the change of ITO microstructures, electrical …
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