Small-scale plasticity in thin Cu and Al films
作者： Gerhard Dehm , T.John Balk , Hervais Edongué , Eduard Arzt
DOI: 10.1016/S0167-9317(03)00395-2
关键词: Crystallite 、 Carbon film 、 Composite material 、 Dislocation 、 Flow stress 、 Materials science 、 Plasticity 、 Microstructure 、 Thin film 、 Deformation mechanism 、 Metallurgy
摘要: Flow stresses in thin metal films significantly exceed the flow of their bulk counterparts. In order to identify underlying deformation mechanisms and correlate them with microstructure, we analysed epitaxial polycrystalline Cu Al films. The (100-2000 nm thickness) were magnetron sputtered on (0001) α--Al2O3 single crystals or nitrided oxidised (001) Si substrates. For films, stress measurements, which obtained from substrate-curvature tests, agree predictions a dislocation-based model [1,2], whereas for measured film thicknesses down 400 are much higher than predicted. However, thinner reveal plateau room temperature stress. This behavior, as well stress-temperature evolution various will be discussed terms existing theories plasticity under consideration recent situ transmission electron microscopy studies.
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