Shear-solvo defect annihilation of diblock copolymer thin films over a large area.

作者: Ye Chan Kim , Tae Joo Shin , Su-Mi Hur , Seok Joon Kwon , So Youn Kim

DOI: 10.1126/SCIADV.AAW3974

关键词: OptoelectronicsDigital image processingThin filmDiffractionAnnihilationSwellingMaterials scienceScatteringCopolymerAnnealing (metallurgy)

摘要: Achieving defect-free block copolymer (BCP) nanopatterns with a long-ranged orientation over large area remains persistent challenge, impeding the successful and widespread application of BCP self-assembly. Here, we demonstrate new experimental strategy for defect annihilation while conserving structural order enhancing uniformity nanopatterns. Sequential shear alignment solvent vapor annealing generate perfectly aligned low density centimeter-scale areas, outperforming previous single or sequential combinations annealing. The enhanced quality pattern were characterized in unprecedented detail via scattering analysis incorporating mathematical indices using elaborate image processing algorithms. In addition, an advanced sampling method combined coarse-grained molecular simulation, found that domain swelling is driving force annihilation. superior large-scale was further confirmed diffraction optical properties after metallized patterns, suggesting strong potential optoelectrical devices.

参考文章(57)
Mohammad Haghighat, Saman Zonouz, Mohamed Abdel-Mottaleb, Identification Using Encrypted Biometrics computer analysis of images and patterns. pp. 440- 448 ,(2013) , 10.1007/978-3-642-40246-3_55
Jeffrey N. Murphy, Kenneth D. Harris, Jillian M. Buriak, Automated Defect and Correlation Length Analysis of Block Copolymer Thin Film Nanopatterns PLOS ONE. ,vol. 10, ,(2015) , 10.1371/JOURNAL.PONE.0133088
Su-Mi Hur, Vikram Thapar, Abelardo Ramírez-Hernández, Gurdaman Khaira, Tamar Segal-Peretz, Paulina A Rincon-Delgadillo, Weihua Li, Marcus Müller, Paul F Nealey, Juan J de Pablo, None, Molecular pathways for defect annihilation in directed self-assembly Proceedings of the National Academy of Sciences of the United States of America. ,vol. 112, pp. 14144- 14149 ,(2015) , 10.1073/PNAS.1508225112
So Youn Kim, Jessica Gwyther, Ian Manners, Paul M. Chaikin, Richard A. Register, Metal‐Containing Block Copolymer Thin Films Yield Wire Grid Polarizers with High Aspect Ratio Advanced Materials. ,vol. 26, pp. 791- 795 ,(2014) , 10.1002/ADMA.201303452
Jiyoung Jeong, Jeong Sook Ha, Sang-Soo Lee, Jeong Gon Son, Topcoat-Assisted Perpendicular and Straightly Parallel Coexisting Orientations of Block Copolymer Films Macromolecular Rapid Communications. ,vol. 36, pp. 1261- 1266 ,(2015) , 10.1002/MARC.201500088
Woon Ik Park, Sheng Tong, Yuzi Liu, Il Woong Jung, Andreas Roelofs, Seungbum Hong, Tunable and rapid self-assembly of block copolymers using mixed solvent vapors. Nanoscale. ,vol. 6, pp. 15216- 15221 ,(2014) , 10.1039/C4NR04726E
LinLin Zhao, K. Lance Kelly, George C. Schatz, The Extinction Spectra of Silver Nanoparticle Arrays: Influence of Array Structure on Plasmon Resonance Wavelength and Width† Journal of Physical Chemistry B. ,vol. 107, pp. 7343- 7350 ,(2003) , 10.1021/JP034235J
Sang Ouk Kim, Harun H Solak, Mark P Stoykovich, Nicola J Ferrier, Juan J De Pablo, Paul F Nealey, None, Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates Nature. ,vol. 424, pp. 411- 414 ,(2003) , 10.1038/NATURE01775
Jinan Chai, Dong Wang, Xiangning Fan, Jillian M. Buriak, Assembly of aligned linear metallic patterns on silicon. Nature Nanotechnology. ,vol. 2, pp. 500- 506 ,(2007) , 10.1038/NNANO.2007.227
Ion Bita, Joel KW Yang, Yeon Sik Jung, Caroline A Ross, Edwin L Thomas, Karl K Berggren, None, Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates. Science. ,vol. 321, pp. 939- 943 ,(2008) , 10.1126/SCIENCE.1159352