Method and apparatus for measuring dimension of a pattern formed on a semiconductor wafer
作者： Wataru Nagatomo , Hidetoshi Morokuma , Ryoichi Matsuoka , Takumichi Sutani , Atsushi Miyamoto
DOI:
关键词: Section (archaeology) 、 Image (mathematics) 、 Engineering 、 Image file formats 、 Artificial intelligence 、 Computer vision 、 CAD 、 Wafer 、 Brightness 、 Dimension (vector space) 、 Minimum time
摘要: In an imaging recipe creating apparatus that uses a scanning electron microscope to create for SEM observation of semiconductor pattern, in order the measuring wiring width and other various dimension values pattern from image thus evaluating shape is automatically generated within minimum time by analysis using CAD obtained conversion data, creation unit creates converting data into format includes image-quantizing determining section, brightness information providing deformation processing section; being created unit.
lens.org 参考文章(19)
Chi-Song Horng, Ram S. Ramanujam, Roy V. Prasad, System and method for reducing patterning variability in integrated circuit manufacturing through mask layout corrections ,(2004)
Timothy E. Neary, Edward W. Conrad, Orest Bula, Feedback method to repair phase shift masks ,(1997)
Tadashi Kitamura, Masahiro Yamamoto, Pattern inspection apparatus, pattern inspection method, and recording medium ,(2005)
Harry Stanton Gallarda, Lakshman Srinivasan, Jun Liu, Kais Jameel Maayah, Richard Barnard, Automated repetitive array microstructure defect inspection ,(2001)
Wataru Nagatomo, Hidetoshi Morokuma, Ryoichi Matsuoka, Takumichi Sutani, Atsushi Miyamoto, Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern ,(2006)
Hidetoshi Nishiyama, Takafumi Okabe, Yukihiro Shibata, Shunji Maeda, Method of inspecting defects ,(2004)
Wataru Nagatomo, Hidetoshi Morokuma, Ryoichi Matsuoka, Atsushi Miyamoto, Scanning Electron Microscope and a Method for Imaging a Specimen Using the Same ,(2012)
Scott Westfall, Daniel Piper, Automated metrology recipe generation ,(2005)
David White, Taber H. Smith, Characterization and verification for integrated circuit designs ,(2002)
Tadashi Kitamura, Toshiaki Hasebe, Masatoshi Tsuneoka, Pattern inspection apparatus and method ,(2006)