Sulfonium Salts of Alicyclic Group Functionalized Semifluorinated Alkyl Ether Sulfonates As Photoacid Generators
作者： Yi Yi , Ramakrishnan Ayothi , Yueh Wang , Mingqi Li , George Barclay
DOI: 10.1021/CM901366R
关键词: Thermal stability 、 Sulfonate 、 Organic chemistry 、 Polymer chemistry 、 X-ray photoelectron spectroscopy 、 Solubility 、 Polymer 、 Sulfonium 、 Fluoride 、 Chemistry 、 Alicyclic compound
摘要: We describe new sulfonium salts incorporating semifluorinated sulfonate anions and their successful application as photoacid generators (PAGs) intended to solve the environmental problems caused by perfluorooctyl (PFOS). By utilizing simple unique chemistries based on 5-iodooctafluoro-3-oxapentanesulfonyl fluoride, a series of alicyclic-group functionalized octafluoro-3-oxapentane-sulfonate were prepared in high purity yield. Triphenylsulfonium (TPS) norbornyl γ-butyrolactone groups octafluoro-3-oxapentanesulfonates extensively studied. They have excellent thermal stability good solubility various polar solvents. Their optical properties thoroughly investigated. Angle resolved X-ray photoelectron spectroscopy (XPS) analysis confirmed that TPS are uniformly distributed polymer films, whereas PFOS is heavily segregated film surface. Lithographic performance together with ...
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