Review of SI traceable force metrology for instrumented indentation and atomic force microscopy

作者: Jon R Pratt , John A Kramar , David B Newell , Douglas T Smith

DOI: 10.1088/0957-0233/16/11/002

关键词: Atomic force microscopyNISTNanotechnologyMaterials scienceUnits of measurementMetrologyNanoscopic scaleInstrumented indentationInstrumentation (computer programming)Applied mathematics

摘要: … in terms of SI mechanical quantities, the availability of quantum-based electrical standards has … The capacitance of this transducer is a function of mechanical force; we use an Andeen–…

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