One-step micropatterning of highly-ordered semi-crystalline poly(vinylidene fluoride-co-trifluoroethylene) films by a selective shear and detachment process
作者： Jiyoun Chang , Hee Joon Jung , Huisu Jeong , Youn Jung Park , Jinwoo Sung
DOI: 10.1016/J.ORGEL.2010.10.007
关键词: Thin film 、 Composite material 、 Shear (sheet metal) 、 Shearing (physics) 、 Substrate (electronics) 、 Ferroelectricity 、 Micropatterning 、 Materials science 、 Non-volatile memory 、 Crystal
摘要: Abstract We present a one-step route for micropatterning thin ferroelectric poly(vinylidene fluoride-co-trifluoroethylene) (PVDF-TrFE) film with both molecular and microstructural crystal control over large area. The method is based on the static mechanical shearing subsequent detachment of spin coated pre-patterned Al which has been lithographically prepared SiO2 substrate under appropriate thermal conditions. Selective in contact gave rise to micropatterns PVDF-TrFE positioned only regions. Further, showed 25-nm-thick crystalline lamellae aligned perpendicular shear direction, wherein c axis crystals was globally ordered parallel direction. sheared patterned films are readily incorporated into non-volatile memory units metal/ferroelectric/metal capacitors bottom gate-top field effect transistors, leading arrays devices enhanced performance.
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sci-hub.se 参考文章(30)
A. V. Bune, V. M. Fridkin, Stephen Ducharme, L. M. Blinov, S. P. Palto, A. V. Sorokin, S. G. Yudin, A. Zlatkin, Two-dimensional ferroelectric films Nature. ,vol. 391, pp. 874- 877 ,(1998) , 10.1038/36069
Seok Ju Kang, Youn Jung Park, Jinwoo Sung, Pil Sung Jo, Cheolmin Park, Kap Jin Kim, Beong Ok Cho, Spin cast ferroelectric beta poly(vinylidene fluoride) thin films via rapid thermal annealing Applied Physics Letters. ,vol. 92, pp. 012921- ,(2008) , 10.1063/1.2830701
W. Kaufmann, J. Petermann, N. Reynolds, E.L. Thomas, S.L. Hsu, Morphological and infra-red studies on highly oriented poly(vinylidene fluoride)/poly(methyl methacrylate) blends Polymer. ,vol. 30, pp. 2147- 2152 ,(1989) , 10.1016/0032-3861(89)90240-1
Joo-Won Yoon, Shun-ichiro Ohmi, Byung-Eun Park, Hiroshi Ishiwara, Impact of Kr gas mixing in oxygen plasma etching of ferroelectric poly(vinylidene fluoride-trifluoroethylene) copolymer films Applied Physics Letters. ,vol. 93, pp. 162904- ,(2008) , 10.1063/1.2970085
Lei Zhang, Stephen Ducharme, Jiangyu Li, Microimprinting and ferroelectric properties of poly(vinylidene fluoride-trifluoroethylene) copolymer films Applied Physics Letters. ,vol. 91, pp. 172906- ,(2007) , 10.1063/1.2800803
Hee Joon Jung, Jiyoun Chang, Youn Jung Park, Seok Ju Kang, Bernard Lotz, June Huh, Cheolmin Park, Shear-Induced Ordering of Ferroelectric Crystals in Spin-Coated Thin Poly(vinylidene fluoride-co-trifluoroethylene) Films Macromolecules. ,vol. 42, pp. 4148- 4154 ,(2009) , 10.1021/MA900422N
A. Gerber, M. Fitsilis, R. Waser, Timothy J. Reece, E. Rije, Stephen Ducharme, H. Kohlstedt, Ferroelectric field effect transistors using very thin ferroelectric polyvinylidene fluoride copolymer films as gate dielectrics Journal of Applied Physics. ,vol. 107, pp. 124119- ,(2010) , 10.1063/1.3437638
T. Sekitani, T. Yokota, U. Zschieschang, H. Klauk, S. Bauer, K. Takeuchi, M. Takamiya, T. Sakurai, T. Someya, Organic Nonvolatile Memory Transistors for Flexible Sensor Arrays Science. ,vol. 326, pp. 1516- 1519 ,(2009) , 10.1126/SCIENCE.1179963
Kuniko Kimura, Kei Kobayashi, Hirofumi Yamada, Kazumi Matsushige, Investigation of molecular chain orientation change of polymer crystals in phase transitions by friction anisotropy measurement. Langmuir. ,vol. 23, pp. 4740- 4745 ,(2007) , 10.1021/LA063270P
Seok Ju Kang, Youn Jung Park, Insung Bae, Kap Jin Kim, Ho-Cheol Kim, Siegfried Bauer, Edwin L. Thomas, Cheolmin Park, Printable Ferroelectric PVDF/PMMA Blend Films with Ultralow Roughness for Low Voltage Non‐Volatile Polymer Memory Advanced Functional Materials. ,vol. 19, pp. 2812- 2818 ,(2009) , 10.1002/ADFM.200900589