Manufacturing method for micromechanical component
作者： Michael Offenberg , Udo Bischof , Markus Lutz
DOI:
关键词: Structural engineering 、 Component (thermodynamics) 、 Rotation 、 Edge region 、 Boundary region 、 Materials science 、 Conductor 、 Layer (electronics) 、 Composite material 、 Electrical conductor
摘要: A manufacturing method for a micromechanical component, and in particular rotation rate sensor, which has supporting first layer, an insulating second layer that is arranged on the conductive third layer. The includes following steps: provide form of patterned insulation regions, layer; protective edge region regions corresponding boundary structure resulting from previous steps; pattern out conductor paths running functional component above remove being protected by such way it essentially not removed there.
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