Effect of dielectric film thickness on dielectric charging of RF MEMS capacitive switches
作者： R. Daigler , G. Papaioannou , E. Papandreou , J. Papapolymerou
DOI: 10.1109/MWSYM.2008.4633292
关键词: Optoelectronics 、 Capacitive sensing 、 Voltage 、 Radio frequency 、 Dipole 、 Capacitance 、 Electrical engineering 、 Materials science 、 Capacitor 、 Microelectromechanical systems 、 Dielectric
摘要: For the first time, effects of dielectric film thickness in charging process RF MEMS capacitive switches is presented. Both and MIM capacitors are used to investigate phenomena. The contribution charge injection dipole orientation has been identified. An empirical law that allows prediction stored on was drawn. Above room temperature, dependence thermally stimulated depolarization current a certain activation energy independent inclusion this behavior modeling tools.
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