ROTARY SUBSTRATE COATER
作者： Kobayashi Hiroshi , Matsunaga Sanenobu
DOI:
关键词: Spiral (railway) 、 Current (fluid) 、 Spiral flow 、 Mist 、 Splash 、 Composite material 、 Substrate (printing) 、 Materials science
摘要: PROBLEM TO BE SOLVED: To prevent the mist and particle in a splash preventive cup from depositing on substrate by suppressing spiral current staying cup. SOLUTION: A slit peripheral opening 14c is formed horizontal part 14d inclined 14e of upper 14. Further, 17c similar to 14 lid member 17. The 17 rotated with respect driving mechanism 18 so that openings are aligned, opened. flow stayed released an air introduced 14c, deposition prevented.
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