Multilayer coatings monitoring using admittance diagram
作者： Cheng-Chung Lee , Yu-Jen Chen
DOI: 10.1364/OE.16.006119
关键词:
摘要: A method based on admittance diagram called Admittance Real-time Monitoring, ARM, was proposed to monitor multilayer coatings. This optical monitoring is highly sensitive and capable compensate for thickness errors. The sensitivities of ARM were compared with that the conventional by using runsheet diagram. in situ error compensation showed a great improvement performance when utilized an anti-reflection coating process.
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