Control Module for Deposition of Optical Thin Films

摘要: The deposition controller controls a coating machine used in the of thin film coatings. is particularly useful for multiple layers or co-deposition materials. integrated system single hardware unit controlled by software residing on local computer. combines functionality controller, mass flow quartz crystal optical monitor chip change and an signal analyzer. utilizes Programmable Logic Controller (PLC) purpose controlling process. A run sheet file to create set process parameters. also examines at time its opening integrity with respect minimum layer thickness requirement expressed terms QWOT (quarter wave thickness). optimized polynomial regression function technique accurate termination while monitoring reflection transmission calculating first second derivatives eliminate false points.