Inelastic interactions of electrons with surfaces: application to Auger-electron spectroscopy and X-ray photoelectron spectroscopy
作者： C.J Powell
DOI: 10.1016/0039-6028(94)90644-0
关键词:
摘要: Abstract Electron-based probes of surface properties are used frequently in science since strong inelastic scattering for electron energies between about 50 and 2000 eV ensures high sensitivity. An overview is given developments the understanding solids with emphasis on important properties. Auger-electron spectroscopy (AES) X-ray photoelectron (XPS) two techniques most commonly measurements composition. We give a brief description development AES XPS then proceed to describe role XPS. Attention measurement attenuation lengths, calculation mean free paths, intensity quantitative
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