Influence of power and temperature on properties of sputtered AZO films

摘要: Abstract Aluminum-doped zinc oxide films (AZO) were deposited on glass substrates by magnetron sputtering. The effect of RF power and deposition temperature wettability optical properties AZO are studied in detail. increase from 60 W to 180 W (power density 1.54 4.62 W/m2) leads evolution (100), (002) (101) textures oxide. XRD results shows increased preferred orientation plane along c-axis for films. grain size increases 14 nm 23 nm with 17 nm 25 nm 200 °C 600 °C. static dynamic contact angle formed water ethylene glycol varies as a function temperature. an transmission 80% 60%, refractive index 1.49 1.51 band gap values 3.29 eV 3.21 eV obtained the wavelength range 350–800 nm. electric resistivity 3.9 × 10− 2 1.1 × 10− 2 Ω·cm depending upon variation