Charge loss in metal-nitride-oxide-semiconductor (MNOS) devices at high temperatures

作者: C.S. Dobbs , W.D. Brown , J.R. Yeargan

DOI: 10.1016/0038-1101(83)90098-9

关键词:

摘要: Abstract The charge loss from the nitride layer of MNOS transistors has been studied with emphasis on temperature effects in range 25 to 175°C. trend major interest is increase logarithmic decay rate dominant negative threshold voltage increasing temperature. This result believed due a combination three related mechanisms: (1) thermal excitation (TE) discharge, (2) Poole-Frenkel emission-drift-capture events and (3) conductivity

参考文章(13)
C. A. Neugebauer, J. F. Burgess, Endurance and memory decay of MNOS devices Journal of Applied Physics. ,vol. 47, pp. 3182- 3191 ,(1976) , 10.1063/1.323114
S. Zirinsky, Charge transfer properties of mnos structures as influenced by processing parameters Journal of Electronic Materials. ,vol. 4, pp. 591- 624 ,(1975) , 10.1007/BF02666237
H. Schauer, E. Arnold, P.C. Murau, Interface states and memory decay in MNOS capacitors IEEE Transactions on Electron Devices. ,vol. 25, pp. 1037- 1041 ,(1978) , 10.1109/T-ED.1978.19220
L. Lundkvist, I. Lundström, C. Svensson, Discharge of MNOS structures Solid-State Electronics. ,vol. 16, pp. 811- IN1 ,(1973) , 10.1016/0038-1101(73)90178-0
Bob H. Yun, Electron and hole transport in CVD Si3N4films Applied Physics Letters. ,vol. 27, pp. 256- 258 ,(1975) , 10.1063/1.88414
R.A. Williams, M.M.E. Beguwala, The effect of electrical conduction of Si 3 N 4 on the discharge of MNOS memory transistors IEEE Transactions on Electron Devices. ,vol. 25, pp. 1019- 1023 ,(1978) , 10.1109/T-ED.1978.19217
Leif Lundkvist, Christer Svensson, Bertil Hansson, Discharge of MNOS structures at elevated temperatures Solid-state Electronics. ,vol. 19, pp. 221- 227 ,(1976) , 10.1016/0038-1101(76)90166-0
R. V. Jones, W. D. Brown, Endurance and retention of mnos devices over the temperature range from −50°c to +125°c Journal of Electronic Materials. ,vol. 10, pp. 959- 972 ,(1981) , 10.1007/BF02661186
VV Athani, Microprocessor based data acquisition system Microprocessors and Microsystems. ,vol. 3, pp. 359- 364 ,(1979) , 10.1016/0141-9331(79)90214-X
M.H. White, J.W. Dzimianski, M.C. Peckerar, Endurance of thin-oxide nonvolatile MNOS memory transistors IEEE Transactions on Electron Devices. ,vol. 24, pp. 577- 580 ,(1977) , 10.1109/T-ED.1977.18781