Design, fabrication and characterization of an axial-flow turbine for flow sensing

作者: Guodang Hong , A.S. Holmes , M.E. Heaton , K.P. Pullen

DOI: 10.1109/SENSOR.2003.1215570

关键词:

摘要: This paper presents a novel micro-power conversion device that combines an axial flow turbine with axial-flux electromagnetic generator. The has sandwich structure, consisting of top silicon stator, polymer rotor and bottom stator. Axial gas through the causes rotation, while permanent magnets embedded in induce output voltage planar coils on stators. Compared to radial devices axial-flow design is more compact can operate at lower pressure ratios. Details fabrication process are given, preliminary results presented for variation voltage, rotation speed, ratio rate nitrogen gas. test show operation over wide dynamic range.

参考文章(7)
H. I. H. Saravanamuttoo, G. F. C. Rogers, H. Cohen, Gas turbine theory ,(1973)
Malcolm C. Gower, Excimer laser microfabrication and micromachining First International Symposium on Laser Precision Microfabrication (LPM2000). ,vol. 4088, pp. 124- 131 ,(2000) , 10.1117/12.405698
T.G. Wiegele, Micro-turbo-generator design and fabrication: a preliminary study intersociety energy conversion engineering conference. ,vol. 4, pp. 2308- 2313 ,(1996) , 10.1109/IECEC.1996.561178
KR Pullen, MR Etemad, A Fenocchi, The high speed axial flux disc generator - unlocking the potential of the automotive gas turbine IEE Colloquium on Machines and Drives for Electric and Hybrid Vehicles. pp. 8- 8 ,(1996) , 10.1049/IC:19960900
Guodong Hong, A.S. Holmes, M.E. Heaton, SU8 resist plasma etching and its optimisation symposium on design, test, integration and packaging of mems/moems. pp. 268- 271 ,(2003) , 10.1109/DTIP.2003.1287050
Bernard S. Massey, Mechanics of Fluids ,(1970)
A. Mehra, A.A. Ayon, I.A. Waitz, M.A. Schmidt, Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 8, pp. 152- 160 ,(1999) , 10.1109/84.767111