Electrospray Deposition of Diamond Nanoparticle Nucleation Layers for Subsequent CVD Diamond Growth

作者: Oliver J.L. Fox , James O.P. Holloway , Gareth M. Fuge , Paul W. May , Mike N.R. Ashfold

DOI: 10.1557/PROC-1203-J17-27

关键词:

摘要: Nucleation is the rate-determining step in initial stages of most chemical vapour deposition processes. In order to achieve uniform diamond thin films it necessary seed non-diamond substrates. Here we discuss a simple electrospray technique for application 5 nm particles onto substrates various sizes. The influence selected parameters, such as experimental spatial arrangement and colloidal properties, are analysed optimizing method by optical electron microscopy, both before after nanocrystalline on layer. advantages limitations highlighted relation other commonly exploited nucleation techniques.

参考文章(13)
M.J. Chiang, M.H. Hon, Positive dc bias-enhanced diamond nucleation with high CH4 concentration Diamond and Related Materials. ,vol. 10, pp. 1470- 1476 ,(2001) , 10.1016/S0925-9635(00)00579-3
D. Das, R. N. Singh, A review of nucleation, growth and low temperature synthesis of diamond thin films International Materials Reviews. ,vol. 52, pp. 29- 64 ,(2007) , 10.1179/174328007X160245
YK Liu, PL Tso, IN Lin, Y Tzeng, YC Chen, None, Comparative study of nucleation processes for the growth of nanocrystalline diamond Diamond and Related Materials. ,vol. 15, pp. 234- 238 ,(2006) , 10.1016/J.DIAMOND.2005.06.020
M. D. Irwin, C. G. Pantano, P. Gluche, E. Kohn, Bias-enhanced nucleation of diamond on silicon dioxide Applied Physics Letters. ,vol. 71, pp. 716- 718 ,(1997) , 10.1063/1.119839
GS Yang, M Aslam, KP Kuo, DK Reinhard, J Asmussen, Effect of ultrahigh nucleation density on diamond growth at different growth rates and temperatures Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 13, pp. 1030- 1036 ,(1995) , 10.1116/1.587898
G. S. Yang, M. Aslam, Ultrahigh nucleation density for growth of smooth diamond films Applied Physics Letters. ,vol. 66, pp. 311- 313 ,(1995) , 10.1063/1.113528
L. Demuynck, J.C. Arnault, C. Speisser, R. Polini, F. Le Normand, Mechanisms of CVD diamond nucleation and growth on mechanically scratched and virgin Si(100) surfaces Diamond and Related Materials. ,vol. 6, pp. 235- 239 ,(1997) , 10.1016/S0925-9635(96)00709-1
S.-Tong Lee, Zhangda Lin, Xin Jiang, CVD diamond films: nucleation and growth Materials Science & Engineering R-reports. ,vol. 25, pp. 123- 154 ,(1999) , 10.1016/S0927-796X(99)00003-0
A. A. Morrish, Pehr E. Pehrsson, Effects of surface pretreatments on nucleation and growth of diamond films on a variety of substrates Applied Physics Letters. ,vol. 59, pp. 417- 419 ,(1991) , 10.1063/1.105448
Yuxing Tang, Dean M. Aslam, Technology of polycrystalline diamond thin films for microsystems applications Journal of Vacuum Science & Technology B. ,vol. 23, pp. 1088- 1095 ,(2005) , 10.1116/1.1926290