Evolution mechanisms of the surface morphology of grains in ZnO thin films grown on p-InP substrates due to thermal annealing

作者: Jong Min Yuk , Jeong Yong Lee , Young-Soo No , Tae Whan Kim , Won Kook Choi

DOI: 10.1063/1.2957467

关键词:

摘要: Transmission electron microscopy (TEM), high-resolution TEM, and atomic force images showed that the columnar structure surface morphology of grains in ZnO thin films grown on p-InP substrates were changed due to thermal treatment. The variation was attributed curvature modification subpopulations consisting grains. While top became parallel with {0001} planes treatment, rough. Evolution mechanisms are described.

参考文章(22)
Burag Yaglioglu, Hyo-Young Yeom, David C. Paine, Crystallization of amorphous In2O3–10 wt % ZnO thin films annealed in air Applied Physics Letters. ,vol. 86, pp. 261908- ,(2005) , 10.1063/1.1977209
N Boukos, C Chandrinou, C Stogios, K Giannakopoulos, A Travlos, Low temperature growth of single-crystal ZnO nanorods Nanotechnology. ,vol. 18, pp. 275601- ,(2007) , 10.1088/0957-4484/18/27/275601
Sung-Kyu Kim, Se-Young Jeong, Chae-Ryong Cho, Structural reconstruction of hexagonal to cubic ZnO films on Pt/Ti/SiO2/Si substrate by annealing Applied Physics Letters. ,vol. 82, pp. 562- 564 ,(2003) , 10.1063/1.1536253
Jae Joon Lee, Yong Bae Kim, Young Soo Yoon, Deposition and structural properties of piezoelectric ZnO epitaxial film on p-InP (1 0 0) substrate for FBAR Applied Surface Science. ,vol. 244, pp. 365- 368 ,(2005) , 10.1016/J.APSUSC.2004.09.146
M. K. Ryu, S. H. Lee, M. S. Jang, G. N. Panin, T. W. Kang, Postgrowth annealing effect on structural and optical properties of ZnO films grown on GaAs substrates by the radio frequency magnetron sputtering technique Journal of Applied Physics. ,vol. 92, pp. 154- 158 ,(2002) , 10.1063/1.1483371
Jin-Wook Shin, Jeong Yong Lee, Young-Soo No, Tate Whan Kim, Wee Kiong Choi, Correlation between the atomic structures and the misorientation angles of [0001]-tilt grain boundaries at triple junctions in ZnO thin films grown on Si substrates Applied Physics Letters. ,vol. 89, pp. 101904- ,(2006) , 10.1063/1.2338792
Toru Aoki, Yoshinori Hatanaka, David C. Look, ZnO diode fabricated by excimer-laser doping Applied Physics Letters. ,vol. 76, pp. 3257- 3258 ,(2000) , 10.1063/1.126599
Y Yoshino, K Inoue, M Takeuchi, T Makino, Y Katayama, T Hata, Effect of substrate surface morphology and interface microstructure in ZnO thin films formed on various substrates Vacuum. ,vol. 59, pp. 403- 410 ,(2000) , 10.1016/S0042-207X(00)00294-3
I.W. Kim, S.J. Doh, C.C. Kim, Jung Ho Je, J. Tashiro, M. Yoshimoto, Effect of evaporation on surface morphology of epitaxial ZnO films during postdeposition annealing Applied Surface Science. ,vol. 241, pp. 179- 182 ,(2005) , 10.1016/J.APSUSC.2004.09.087