Atomic force microscope employing beam tracking

摘要: A scanning probe microscope such as an atomic force for measuring a feature of sample surface with sharp over area interest by means collimated light beam reflected from reflective responsive to movement the relative surface, detected position sensitive photodetector, includes scanner having one end fixed and another free attached moving probe. Also is mount tracking lens which interposed into cause focus spot track translational caused scanner. In this way, wide range ranges up about 100×100 square micrometers accommodated head mode switching without need disturb sample. Preferably bi-convex source diode laser.