Humidity chamber for scanning stylus atomic force microscope with cantilever tracking

作者: Edward Embree , Mark R. VanLandingham , Jonathan W. Martin

DOI:

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摘要: The present invention provides a novel humidity chamber suitable for use with an atomic force microscope (AFM). of the employs intricate geometrical design which can accommodate scanned-stylus AFM optical lever. This allows to enclose one or more scanner, tip assembly, lever detection system, sample and objective lens, without degrading ability operate related systems. is comprised two major pieces: within scanning head assembly placed, integrated platform spring-loaded base-plate that samples be loaded unloaded removal from assembly. platform, extends up inserted into chamber, include magnet securely attached base. Once positioned inside locking pin between bottom portion secure base-plate. base z-directional motors used position just below probe prior scanning, while at same time providing essentially air-tight fit head. An embodiment components sense control relative chamber.

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