Electrical Characterization of Some Native Insulators on Germanium
作者： O. J. Gregory , E. E. Crisman , Lisa Pruitt , D. J. Hymes , James J. Rosenberg
DOI: 10.1557/PROC-76-307
关键词:
摘要: Preliminary characterization of two native insulators on germanium is reported. A technique for preparing oxide by a room temperature chemical (wet oxidation) described. Compositional data based IR transmission and ellipsometry, as well characteristics MOS capacitors this film are given. Also, compositional electrical nitrided atmospheric pressure oxides reported here. These films have very low fixed charge interface state densities, show excellent potential use gate in technology.
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