The effect of Cu content on the microstructures, mechanical and antibacterial properties of Cr–Cu–N nanocomposite coatings deposited by pulsed DC reactive magnetron sputtering
作者： Yu-Chu Kuo , Jyh-Wei Lee , Chaur-Jeng Wang , Yu-Jie Chang
DOI: 10.1016/J.SURFCOAT.2007.05.062
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摘要: Abstract The nanocomposite Cr–Cu–N thin films with Cu content ranging from 1.6 to 24.3 at.% have been deposited by a bipolar asymmetric pulsed DC reactive magnetron sputtering system. A strong CrN (200) texture is found for each coating. columnar structure was replaced dense and compact morphology when the coating contained more than 8.2 at.% Cu. An unusual hardness enhancement observed on 15.7 at% Cu, which possibly due its grain refinement effect. For containing 15.7 at.% combination of high hardness, low coefficient friction good antibacterial properties are achieved. film developed in this study sufficient abilities can be used as promising candidate deposit surfaces medical apparatus food processing equipments.
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