Photodetector and opto-electronic integrated circuit

作者: Goro Sasaki

DOI:

关键词:

摘要: A photodetector of the present invention is devised to reduce dark current by employing a novel guard ring structure suitable for mesa type photodiode (PD). Namely, PD has in which p-type or n-type semiconductor region be light receiving area surrounded (guard ring) same conduction type. electrode formed on and kept at potential as an desired current. Also, opto-electronic integrated circuit such that PD, invention, element transistor are common substrate anode cathode conductively connected gate field-effect base bipolar transistor.

参考文章(8)
Mcdonald Robinson, Adrian R. Hartman, Gee-Kung Chang, P-i-n and avalanche photodiodes ,(1983)
G. Sasaki, K.-I. Koike, N. Kuwata, K. Ono, Optoelectronic integrated receivers on InP substrates by organometallic vapor phase epitaxy Journal of Lightwave Technology. ,vol. 7, pp. 1510- 1514 ,(1989) , 10.1109/50.39090
Haruhiko C O Intellectual Prop. Div. Okazaki, Avalanche photodiode having guard ring and method of manufacturing the same ,(1991)
Susumu Yamazaki, Takao Kaneda, Takashi Mikawa, Masahiro Kobayashi, Kazuo Nakajima, A semiconductor photodetector and fabrication process for the same ,(1985)
Anayama Chikashi, SEMICONDUCTOR LIGHT RECEIVING ELEMENT ,(1990)