Modeling of leakage currents in high-κ dielectrics: Three-dimensional approach via kinetic Monte Carlo
作者： Gunther Jegert , Alfred Kersch , Wenke Weinreich , Uwe Schröder , Paolo Lugli
DOI: 10.1063/1.3310065
关键词:
摘要: We report on a simulation algorithm, based kinetic Monte Carlo techniques, that allows us to investigate transport through high-permittivity dielectrics. In the example of TiN/ZrO2/TiN capacitor structures, using best-estimate physical parameters, we have identified dominant mechanisms. Comparison with experimental data reveals be dominated by Poole–Frenkel emission from donorlike trap states at low fields and trap-assisted tunneling high fields.
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