作者: Christian Obermair , Andreas Wagner , Thomas Schimmel
DOI: 10.3762/BJNANO.2.70
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摘要: We demonstrate a method that allows the controlled writing of metallic patterns on nanometer scale using tip an atomic force microscope (AFM) as “mechano–electrochemical pen”. In contrast to previous experiments, no voltage is applied between AFM and sample surface. Instead, passivated surface activated locally due lateral forces this way, area tip–sample interaction narrowly limited by mechanical contact sample, well-defined can be written reproducibly. Nanoscale structures lines copper were deposited, line widths ranged 5 nm 80 nm, depending deposition parameters. A procedure for sequential nanostructures introduced, based understanding passivation process. The mechanism mechano–electrochemical technique investigated, processes site-selective depassivation, deposition, dissolution repassivation electrochemically deposited nanoscale islands are studied in detail.