High resolution germanium zone plates and apertures for soft x-ray focalometry

摘要: Circular Fresnel zone plates, apodized linear and a variety of apertures have been fabricated in smooth germanium films deposited on boron doped silicon membranes. Zone widths as small 60 nm absorbing layers from 0.25 to 0.5 μm thick. These results were achieved using electron beam lithography trilevel resist followed by reactive ion etching transfer the patterns. optical elements are key components soft x‐ray ‘‘focalometer’’ currently being tested at NSLS Brookhaven National Laboratories. The focalometer is system which can be used determine imaging properties an element. In this work it has evaluate convergent mirror both before after multilayer reflective coating was applied. Results knife edge scans images formed spherical 14 radiation reported. applied found only effect these scans.