An ERD/RBS/PIXE apparatus for surface analysis and channeling
作者： C. Janicki , P.F. Hinrichsen , S.C. Gujrathi , J. Brebner , J.-P. Martin
DOI: 10.1016/0168-583X(88)90155-3
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摘要: Abstract A system for surface analysis, lattice localisation of impurities, defect studies in crystalline solids and routine ERD (elastic recoil detection) is described. The apparatus features a high vacuum chamber, computer controlled precision goniometer an energy plus time-of-flight mass discrimination system. First results channeling/ERD experiments using 15–30 MeV 35Cl beams on silicon crystals implanted with B+ BF2+ are presented, as well data the effect beam induced damage boron distribution.
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