Microstructure, mechanical properties and wetting behavior of F: Si–C–N films as bio-mechanical coating grown by DC unbalanced magnetron sputtering

摘要: Abstract A systematic structure and properties investigation on the deposition of fluorinated silicon–carbon–nitride (Si–C–N) films under varying CF 4 flows was carried out by direct current unbalanced magnetron sputtering techniques. Significant role fluorine carbon-doped growth characteristics mechanical in film observed. The chemical bonding configurations, surface topography were characterized means X-ray photoelectron spectroscopy (XPS), Raman infrared spectroscopies, atomic force microscopy (AFM) nano-indentation technique CSM pin-on-disk tribometer. It found that as-deposited F: Si–C–N are amphipathic nature, large variations took place these films’ rate, composition, microstructure when varied from 0 to 9 sccm. At gas flow rate 9 sccm, coatings demonstrated a content 5.95 at.% moderate friction coefficient 0.03. is obvious hardness results coating enhances Co–Cr–Mo alloy approximately 16.3 GPa smoother surface. tribological characterization with sliding against ultrahigh molecular weight polyethylene (UHMWPE) counter-surface fetal bovine serum, shows wear resistance coated alloy/UHMWPE pair show much obviously improvement over uncoated pair. Si–N have potential for joint modification applications.