Preparation and properties of reactively co-sputtered transparent conducting films
作者： H.W. Lehmann , R. Widmer
DOI: 10.1016/0040-6090(75)90041-3
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摘要: … The method of co-sputtering H-14 is ideally suited for a direct … co-sputtering method in determining the optimum dopant or alloy concentration for the preparation of reactively sputtered …
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