Very thin layers prepared by laser ablation from Bi/sub 2/Te/sub 3/ target

作者: R. Zeipl , S. Karamazov , M. Jelinek , P. Lostak , M. Pavelka

DOI: 10.1109/ICT.2003.1287518

关键词:

摘要: Transport properties are presented for 60nm thick layers which were prepared by the laser ablation from a Bi/sub 2/Te/sub 3/ target. The deposited on quartz glass substrates. energy density of beam I target is 2Jcm/sup -2/ and temperature substrate during deposition varies between (200-480/spl deg/C) different samples. influence topography measured Scanning Tunnelling Microscope (STM) presented. BiTe 2/Te phases detected X-ray Diffraction (XRD) method.

参考文章(17)
P. N. Butcher, Theory of Electron Transport in Low-Dimensional Semiconductor Structures Physics of Low-Dimensional Semiconductor Structures. pp. 95- 176 ,(1993) , 10.1007/978-1-4899-2415-5_3
A. Dauscher, A. Thomy, H. Scherrer, Pulsed laser deposition of Bi2Te3 thin films Thin Solid Films. ,vol. 280, pp. 61- 66 ,(1996) , 10.1016/0040-6090(95)08221-2
J. Navrátil, P. Lošťák, J. Horák, Transport Coefficient of Gallium-doped Bi2Te3 Single Crystals Crystal Research and Technology. ,vol. 26, pp. 675- 681 ,(1991) , 10.1002/CRAT.2170260603
R. Czajka, J. Horák, P. Lošt’ák, S. Karamazov, J. Vaniš, J. Walachová, Characterization and nanometer-scale modifications of Bi2Te3 surface via atomic force microscopy Journal of Vacuum Science & Technology B. ,vol. 18, pp. 1194- 1197 ,(2000) , 10.1116/1.591359
Y. H. Shing, Y. Chang, A. Mirshafii, L. Hayashi, S. S. Roberts, J. Y. Josefowicz, N. Tran, Sputtered Bi2Te3 and PbTe thin films Journal of Vacuum Science and Technology. ,vol. 1, pp. 503- 506 ,(1983) , 10.1116/1.571916
N.G. Patel, P.G. Patel, Thermoelectric cooling effect in a p-Sb2Te3−n-Bi2Te3 thin film thermocouple Solid-state Electronics. ,vol. 35, pp. 1269- 1272 ,(1992) , 10.1016/0038-1101(92)90160-E
A. Boyer, E. Cissé, Properties of thin film thermoelectric materials: application to sensors using the Seebeck effect Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 13, pp. 103- 111 ,(1992) , 10.1016/0921-5107(92)90149-4
J. George, B. Pradeep, Preparation and properties of co-evaporated bismuth telluride [Bi2Te3] thin films Solid State Communications. ,vol. 56, pp. 117- 120 ,(1985) , 10.1016/0038-1098(85)90546-0
A Giani, A Boulouz, F Pascal-Delannoy, A Foucaran, A Boyer, MOCVD growth of Bi2Te3 layers using diethyltellurium as a precursor Thin Solid Films. ,vol. 315, pp. 99- 103 ,(1998) , 10.1016/S0040-6090(97)00792-X