Characterization of BST Thin Films using MgO(100) Buffer Layer for Tunable Device
作者： Cheol-In Lee , Kyoung-Tae Kim , Chang-Il Kim
DOI: 10.4313/TEEM.2006.7.2.067
关键词:
摘要: In this paper, we have investigated the structure and dielectric properties of (BST) thin films fabricated on MgO(100)/Si substrate by an alkoxide-based sol-gel method. Both morphology those were analyzed x-ray diffraction (XRD) atomic force microscope (AFM). For substrate, BST exhibited highly (100) orientation. The (100)-oriented showed high constant, tunability, figure merit (FOM). loss tunability annealed at deposited measured 10 kHz 515.9, 0.0082, 54.3%, respectively.
koreascience.or.kr参考文章(11)
D. Dimos, M.V. Raymond, R.W. Schwartz, H.N. Al-Shareef, C.H. Mueller, Tunability and Calculation of the Dielectric Constant of Capacitor Structures with Interdigital Electrodes Journal of Electroceramics. ,vol. 1, pp. 145- 153 ,(1997) , 10.1023/A:1009924716633
J. D. Baniecki, R. B. Laibowitz, T. M. Shaw, P. R. Duncombe, D. A. Neumayer, D. E. Kotecki, H. Shen, Q. Y. Ma, Dielectric relaxation of Ba0.7Sr0.3TiO3 thin films from 1 mHz to 20 GHz Applied Physics Letters. ,vol. 72, pp. 498- 500 ,(1998) , 10.1063/1.120796
M. W. Cole, P. C. Joshi, M. H. Ervin, La doped Ba1−xSrxTiO3 thin films for tunable device applications Journal of Applied Physics. ,vol. 89, pp. 6336- 6340 ,(2001) , 10.1063/1.1366656
Katsuhiro Aoki, Yukio Fukuda, Ken Numata, Akitoshi Nishimura, Electrode Dependences of Switching Endurance Properties of Lead-Zirconate-Titanate Thin-Film Capacitors Japanese Journal of Applied Physics. ,vol. 35, pp. 2210- 2215 ,(1996) , 10.1143/JJAP.35.2210
Yongping Ding, Chengyu Jin, Zhongyan Meng, The effects and mechanism of chemical additives on the pyrolysis evolution and microstructure of sol–gel derived Ba1−xSrxTiO3 thin films Thin Solid Films. ,vol. 375, pp. 196- 199 ,(2000) , 10.1016/S0040-6090(00)01227-X
Soo-Ik Jang, Hyun M. Jang, Structure and electrical properties of boron-added (Ba,Sr)TiO3 thin films fabricated by the sol-gel method Thin Solid Films. ,vol. 330, pp. 89- 95 ,(1998) , 10.1016/S0040-6090(98)00560-4
M.W Cole, P.C Joshi, M.H Ervin, M.C Wood, R.L Pfeffer, The influence of Mg doping on the materials properties of Ba1−xSrxTiO3 thin films for tunable device applications Thin Solid Films. ,vol. 374, pp. 34- 41 ,(2000) , 10.1016/S0040-6090(00)01059-2
Masaki Yamaguchi, Takao Nagamoto, Osamu Omoto, Preparation of highly c-axis-oriented Bi4Ti3O12 thin films and their crystallographic, dielectric and optical properties Thin Solid Films. ,vol. 300, pp. 299- 304 ,(1997) , 10.1016/S0040-6090(96)09456-4
L. A. Knauss, J. M. Pond, J. S. Horwitz, D. B. Chrisey, C. H. Mueller, Randolph Treece, The effect of annealing on the structure and dielectric properties of BaxSr1−xTiO3 ferroelectric thin films Applied Physics Letters. ,vol. 69, pp. 25- 27 ,(1996) , 10.1063/1.118106
Yutaka Ohya, Takashi Ito, Yasutaka Takahashi, Dielectric Properties of Multilayered Ferroelectric Thin Films Fabricated by Sol-Gel Method Japanese Journal of Applied Physics. ,vol. 33, pp. 5272- 5276 ,(1994) , 10.1143/JJAP.33.5272